Metrology and Reliability

Metrology and Reliability

  • Cary 500 Spectrophotometer, 175 – 3300nm, -77K to 350K
  • Perkin Elmer 983 Spectrophotometer, 2 – 55μm
  • Woollam Variable Angle Spectroscopic Ellipsometer, 250-1700nm, 2 – 33µm
  • Nikon HighResolution Microscope, ± 0.29 µm resolution
  • Auto Collimator
  • Zygo Interferometer, λ /20 @ 633nm
  • Zygo Interferometer, λ / 100 @ 1550nm
  • Dektak Profilometer, 1µm to 1mm thick, 4" lateral profile
  • Humidity Chamber, 5-95% RH
  • Thermal Cycling Oven, 10-200C

Nikon High Resolution
Microscope ± 0.29 µm

Zygo Interferometer

Woollam Ellipsometer

Contact Us

707-236-9066