Sonoma Photonics Products and Capabilities
Products and Capabilities
Sonoma Photonics provides support for several aspects of the product development cycle as certified by the AS9100 standardized quality management system.
Products and Capabilities
Patterned Thin Films
SEM image of Dual Layer Photoresist Lift-Off Profile
3mm x 5mm CCD multi-color monolithic filter on 4″ diameter wafer
12″ x 12″ glass with patterned Dark Mirror coating for solar cell application
| Processes | Substrate Materials | Applications |
|
Flexible
|
|
| Aligner | Maximum Substrate Size | Minimum Feature Size | Registration Tolerance |
| Suss MA6 | 6″ diameter x 2mm thickness | 2µm +/-0.5µm | +/-2µm |
| SPI Gen1 | 12″ x 12″ x 4″ | 5µm +/-1µm | +/-15µm |
| SPI Genn II | 36″ x 120″ x 4″ | 10µm +/-3µm | +/-25µm |
*Actual values dependent on film thickness and uniformity
Metrology and Reliability
•Cary 500 Spectrophotometer, 175 – 3300nm, -77K to 350K •Perkin Elmer 983 Spectrophotometer, 2 – 55μm
•Woollam Variable Angle Spectroscopic Ellipsometer, 250-1700nm, 2 – 33µm
•Nikon HighResolution Microscope, ± 0.29 µm resolution
•Auto Collimator
•Zygo Interferometer, λ /20 @ 633nm
•Zygo Interferometer, λ / 100 @ 1550nm
•Dektak Profilometer, 1µm to 1mm thick, 4″ lateral profile
•Humidity Chamber, 5-95% RH
•Thermal Cycling Oven, 10-200C
Nikon High Resolution Microscope ± 0.29 µm
Zygo Interferometer
Woollam Ellipsometer
Additional Capabilities
Rugate Filter for Laser Line Suppression
Optimized for 3 bands with wide angle requirement and OD>3
Polarizing Optics
Through the use of a compensation beamsplitter a non-polarized wavefront can be accomplished at the image focal plane.
Narrow Bandpass Filter
1 nm wide filter at O° & 8° AOI
Precision Uniformity
0.04% Non-Uniformity Over 8 inch Diameter Optic
Gravure Coatings
For application of a Polymer Planarizing film
Appliqué Films
For Optical, Resistive, and Magnetic treatments
Long & Short Wave Bandpass Filters
4 “color filters” patterned on one substrate
Large Area Coating on Flexible Substrate
3′ x 10′ section on Kapton
About Us
Founded in 2000 and acquired by Northrop Grumman in 2009, SPI has vast expertise and proven success in developing and providing superior thin film products to our aerospace, military, and commercial customers. Our high-precision coating capabilities span the Optical & Infra-Red (UV, VIS, NIR, SWIR, MWIR, and LWIR), and the RF spectral wavelengths to meet a vast range of applications and system needs. Utilizing advanced plasma beam and magnetron sputtering deposition techniques, SPI manufactures precision optical filters, mirror coatings, and large area magnetic and resistive films.
SPI is located in Santa Rosa, California, in the heart of wine and craft beer country. Our footprint includes 50,000 sq. ft. of manufacturing space, cleanrooms and metrology.