Surface Parallel Array
The Surface Parallel Array (SPA) offers the system engineer an architecture that provides large amplitude stroke and high spatial frequency correction in a thin integrated package.
Surface Parallel Array
The Surface Parallel Array (SPA) offers the system engineer an architecture that provides large amplitude stroke and high spatial frequency correction in a thin integrated package. The standard mirror offers a 5 mm actuator spacing with 76 or 285 channels and a 4 mm actuator spacing with 420 channels with a Silicon or ULE facesheet coated with gold, aluminum, or protected silver. Custom mirror designs are available for extended stroke range, temperature range, actuator spacing, high frequency operation and high laser power dielectric coatings.
- Individual actuators addressable for high spatial frequency correction
- <500 nm (nom.) single actuator stroke
- All actuators working together produce large amplitude low spatial frequency correction
- 50 um (nom.) total stroke
- SPA DM Flattened to 8 nm rms
- Obtained excellent correctability of low order Zernike polynomials
